For each of these tests, ISO 14644-3:2019 outlines the principle behind its purpose, as well as the procedure (found in Annex B) and apparatus (found in Annex C). Throughout the document, performance tests are specified for two types of cleanrooms and clean zones: those with unidirectional or non-unidirectional airflow; in three possible occupancy states: as-built, as-rest, and operational.
Furthermore, not all cleanroom parameter test procedures are presented in the ISO 14644-3:2019 document. Notably, the procedure and apparatus for the test carried out for the air cleanliness classes by particle concentration and for macroparticles are provided in ISO 14644-1. Furthermore, the specifications for monitoring air cleanliness by nanoscale particle concentrations are provided in ISO 14644-12.
Iso 14644-3 Pdf Free Download
Scope of ISO 14644-3Thispart of ISO 14644 specifies test methods for designated classificationof airborne particulate cleanliness and for characterizing theperformance of cleanrooms and clean zones. Performance tests arespecified for two types of cleanrooms and clean zones: those withunidirectional flow and those with non-unidirectional flow, in threepossible occupancy states: as-built, at-rest and operational. The testmethods recommend test apparatus and test procedures for determining performance parameters. Where the test method is affected by thetype of cleanroom or clean zone, alternative procedures are suggested.For some of the tests, several different methods and apparatus arerecommended to accommodate different end-use considerations. Alternativemethods not included in this part of ISO 14644 may be used if based onagreement between customer and supplier. Alternative methods do notnecessarily provide equivalent measurements. This part of ISO 14644 isnot applicable to the measurement of products or of processes incleanrooms or separative devices.Background of DocumentThefirst meeting of WG 3 was held in 1994 in Tokyo. Initial questionsfaced by the working group were: what was to be included in the standardand what was to be the structure of the standard. During brainstormingsessions in the first meeting, measurements and tests related tocleanrooms were classified into three categories:
Ascleanrooms include all phases of the engineering sciences, themeasurement and test methods related to cleanrooms were numerous. WG 3was requested by ISO/TC 209 to use the following policy to decide whichitems to include in the document:If there are any previouslyestablished standards on the subject, refer to them. Include itemsaccording to the requests or needs of other Working Groups.Themost important objectives of this document are to provide aninternationally common basis of measurement and evaluation of cleanroomsand, at the same time, not to prevent the introduction of newtechnologies. The latter is the reason that the part of this Standardrelated to instrumentation is Informative. The document was submitted asan American National Standard and has been adopted as ANSI/IEST/ISO14644-3:2005 in the United States.
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